JPH0342620Y2 - - Google Patents

Info

Publication number
JPH0342620Y2
JPH0342620Y2 JP1985158082U JP15808285U JPH0342620Y2 JP H0342620 Y2 JPH0342620 Y2 JP H0342620Y2 JP 1985158082 U JP1985158082 U JP 1985158082U JP 15808285 U JP15808285 U JP 15808285U JP H0342620 Y2 JPH0342620 Y2 JP H0342620Y2
Authority
JP
Japan
Prior art keywords
magnetic pole
magnetic
shunt
magnetic field
ion beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985158082U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6266157U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985158082U priority Critical patent/JPH0342620Y2/ja
Publication of JPS6266157U publication Critical patent/JPS6266157U/ja
Application granted granted Critical
Publication of JPH0342620Y2 publication Critical patent/JPH0342620Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
JP1985158082U 1985-10-16 1985-10-16 Expired JPH0342620Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985158082U JPH0342620Y2 (en]) 1985-10-16 1985-10-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985158082U JPH0342620Y2 (en]) 1985-10-16 1985-10-16

Publications (2)

Publication Number Publication Date
JPS6266157U JPS6266157U (en]) 1987-04-24
JPH0342620Y2 true JPH0342620Y2 (en]) 1991-09-06

Family

ID=31081233

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985158082U Expired JPH0342620Y2 (en]) 1985-10-16 1985-10-16

Country Status (1)

Country Link
JP (1) JPH0342620Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6770888B1 (en) * 2003-05-15 2004-08-03 Axcelis Technologies, Inc. High mass resolution magnet for ribbon beam ion implanters
JP4954465B2 (ja) * 2004-11-30 2012-06-13 株式会社Ｓｅｎ イオンビーム／荷電粒子ビーム照射装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53134892U (en]) * 1977-03-31 1978-10-25

Also Published As

Publication number Publication date
JPS6266157U (en]) 1987-04-24

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